FlowVIEW

The system provides comprehensive data including particle count, size, length, roundness, and high-resolution images. It further supports AI-based classification algorithms for deep learning, enabling precise identification and categorization of various particle types.
It is ideal for applications such as process contamination monitoring and cleanliness inspection. The system supports a wide range of sample types and delivers real-time classification with statistical reporting.

Features

• Real-time monitoring of nano-scale particle distribution
• Visualization of particle morphology and shape
• High-speed, high-volume, and high-precision particle analysis in fluids
• Five key analytical metrics for comprehensive data insight
• Enhanced AI recognition for classifying hard-to-detect particles with detailed shape and morphology visualization

• Measurement Range: 0.1 μm to 10 μm
• Measurement Mode: Offline / Online
• Measured Parameters: Particle size, roundness, length, particle size distribution (PSD) chart, and particle images
• System Dimensions: W801 × L519 × H643 mm (±5 mm)
• Weight: 42 kg (±5 kg)

• Trace contamination detection in semiconductor processes
• Materials: roundness, dispersion, and agglomeration analysis
• Display panels: bubble detection and fine contamination analysis
• Water quality: microorganism identification and AI-based classification
• Biomedical: cleanliness analysis of medical instruments
• Food industry: bacterial imaging and classification
• Contamination analysis in liquid and gas samples

Intelligent Fluid Automated Optical Imaging Inspection: Imaging-based fluid optical inspection combines particle size analysis (Sizer) and particle counting (Counter) functions with advanced AI defect detection technology to accurately identify contaminants such as bubbles, crystals, and dust. Seeing is believing, which is the most reliable method and significantly reduces the rate of human error.

Features

• Rapid, high-volume, and precise analysis of particles in fluids
• Image data fully presents particle morphology and appearance
• Precisely counts each particle, ensuring no particle is missed
• Multi-functional image processing and analysis
• AI-powered intelligent feature classification mode (optional)

• Measurement Range: 0.8 μm to 400 μm
• Measurement Mode: Offline / Online
• Measured Parameters: Particle size, roundness, length, particle size distribution (PSD) chart, and particle images
• System Dimensions: W465 × L365 × H300 mm (±5 mm)
• Weight: 23 kg (±2 kg)

It can interpret the original appearance of substances such as translucent colloids, bubbles, and irregular outer contours. Dozens of particle contour information can be provided according to customer needs. Applicable industries include: semiconductors, electronics manufacturing, IC panels, industrial materials, water recycling, energy, biomedicine and pharmaceuticals, and food processing.

An online wet-process micro-particle automation monitoring solution that provides continuous, long-term particle count monitoring and real-time trend insights across process stages. 

Features

• Online 24-hour monitoring of particle counts to capture trends across process stages. 
• Establish stable process standards: basis for tool maintenance and process stability; built-in auto data storage for one year. 
• One device, multi-point monitoring with 9 detection channels; integrable with existing production tools to lower equipment cost. 
• Defect prediction / Auto alarm: threshold-triggered alerts with real-time data feedback; supports preventive maintenance (e.g., filter change) to reduce abnormal-loss cost. 
• Compatible liquids: developer, mixed-acid PR remover, copper/aluminum acids, DI water, etc. 

• Particle size range 0.1 μm – 100 μm
• Detection channels 9
• Cleaning channel 1
• Sample temp/viscosity 5–80 °C / 150 cps
• Particle concentration limit 4,000 P/ml @ 5% coincidence error
• Dimensions W850 × L550 × H1629 mm (±5 mm)
• Weight 105 kg (±5 kg)
• Options De-bubbles / Liquid recirculation system

• Quality control stages: incoming (IQC); in-process and outbound (IPQC, PQC, OQC). 
• Chemicals/Media: IPA, stripping agents, developer, KOH cleaner, remover (stripper), electroless/electroplating solutions, DI water, metal etchant, stripper, copper acid, aluminum acid. 
• Wafer manufacturing: etching, stripping, lithography, cleaning.
• PCB: electroless/electroplating, etching, stripping.
• Packaging: cleaning. 

Uses exclusive nano-membrane to create an atmospheric chamber inside the SEM vacuum, preserving the original state of liquid samples without drying. With analysis software, it outputs particle size distribution, dispersion/aggregation, shape, and EDS-assisted composition; highest liquid-phase resolution detects 7 nm particles, streamlining workflows and shortening development time.

Features

• Preserve liquids under SEM with the nano-membrane atmospheric chamber.
• Integrated analysis with FlowVIEW Lite: size distribution, dispersion/aggregation, concentration, shape, composition (with EDS).
• Resolution: liquid-phase detection down to 7 nm.# Compatibility: 99% with major SEM brands/models (FEI, ThermoFisher, Keyence, JEOL, Hitachi, ZEISS, Phenom, TESCAN…) and relevant preparation tools.
• Ease of use: sample sealing in 30 seconds.

• Industries: Semiconductor, Energy, Biopharma. 
• Example materials: Metal plating, CMP slurry, coating materials, solder paste, silver paste, aluminum, copper paste, MLCC, probiotics, pheromone, black mold, fungus spores.