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基於壓力感測之晶圓拋光平坦度分析

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  • 基於壓力感測之晶圓拋光平坦度分析

UNEO 壓力分佈分析系統可應用於晶圓拋光(CMP)製程中,用以分析拋光頭(Polishing Head)的壓力分佈狀態。透過軟體即時顯示壓力分佈影像,製程人員可即時進行設備參數調整與最佳化設定。導入該系統可顯著提升產能表現,同時降低拋光過程中產生碎屑(Debris)的風險,並有效減少人力成本與製程調整所需的時間成本,進而達成整體製造成本的最佳化。

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UNEO

利永環球科技股份有限公司(Uneo Inc.)是具備超薄型壓力感測器設計、生產及系統整合能力的電子科技公司;無線藍芽reader可以讀取24*24點,並且可以離線儲存,sensor一樣可以根據客戶的需求客製化。如超薄型靈敏度可調式鍵盤、主動式壓力筆感測元件、全平面防水按鍵、及各類穿戴式醫療、運動用品和工業用儀器等,以創新的應用將科技與生活提升到全新的使用情境。

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