TMC designs and manufactures advanced vibration isolation systems specifically for nanotechnology applications. These systems are engineered to stabilize building floor vibrations, enabling ultra-precision measurements, instrumentation, and manufacturing processes.
As an industry leader, TMC continues to push boundaries with high-performance active inertial vibration cancellation systems, incorporating piezoelectric actuators and digital controllers. The product range also includes passive solutions—from compact desktop microscope platforms to full-scale optical table systems in virtually any size.
TMC solutions empower cutting-edge research and production in photonics, semiconductor fabrication, life sciences, drug discovery, and nanotechnology.
STACIS III
STACIS® III is a high-performance active vibration isolation system designed to eliminate floor vibrations in real time. Using advanced inertial sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS continuously monitors floor motion and actively compensates for it by precisely expanding and contracting its actuators.
Originally developed for isolating critical tools in precision microlithography, metrology, and inspection processes within advanced semiconductor facilities, STACIS has become the industry-standard solution for sensitive instruments operating in high-vibration environments. Applications include semiconductor fabs, failure analysis laboratories, nanotechnology research, nanofabrication centers, and advanced materials science facilities.
Key Features
- Engineered for maximum stiffness—hundreds of times stiffer than traditional air isolators
- Free from the limitations of air-based isolation systems—no soft suspension, no dependency on internal damping characteristics
- Ideal for use under tools with internal active air systems; both systems can function optimally in tandem
- Unique serial design with proprietary high-force piezoelectric actuators for superior control and stability
- Wide active isolation bandwidth from 0.6 Hz to 150 Hz
- Achieves 90% vibration reduction starting at just 2 Hz
SEM-Base VI
The SEM-Base® VI is the next evolution in active piezoelectric vibration cancellation from the STACIS product line. Engineered to support all commercial Scanning Electron Microscopes (SEMs), as well as a wide range of Focused Ion Beam (FIB) and Small Dual Beam instruments, SEM-Base VI delivers enhanced vibration isolation, a faster and more robust controller, and an advanced graphical user interface (GUI). This next-generation platform helps laboratories and research facilities achieve floor vibration performance that meets or exceeds the requirements set by tool manufacturers.
SEM-Base VI employs a unique serial architecture that utilizes vibration sensors to measure floor movement rather than payload vibrations. This design ensures that payload resonances do not interfere with isolation performance or induce instability, a common limitation in other designs. Using ultra-sensitive low-frequency inertial velocity sensors, SEM-Base VI excels in detecting and cancelling sub-Hz vibrations. When combined with proprietary piezoelectric actuator technology, it achieves exceptional vibration control even on already stable floors.
Key Features
- Hard-Mount Technology – Fully compatible with internal SEM vibration control systems, effectively attenuates low-frequency floor vibrations starting at 0.6 Hz.
- Active Inertial Vibration Cancellation – Utilizes highly sensitive low-frequency inertial velocity sensors to maintain high isolation performance, even in quiet environments.
- Serial Design with Piezoelectric Technology – Offers a wide active bandwidth from 0.6 Hz to 150 Hz with up to 90% vibration reduction beginning at 2 Hz, made possible through a proprietary high-force piezoelectric architecture.
CleanBench
CleanBench™ represents the next generation of TMC's industry-standard 63 series laboratory tables. Renowned for superior vibration isolation, these tables are the preferred choice for high-performance applications such as atomic force microscopy (AFM), confocal microscopy, in vitro fertilization (IVF), patch-clamping, interferometry, and metrology. CleanBench integrates TMC's proprietary Gimbal Piston Vibration Isolators and an enhanced tabletop platform that delivers superior performance and functionality.
Key Features
- Innovative tabletop design (patent pending) that merges the advantages of TMC's CleanTop steel honeycomb structure with an ultra-rigid, damped, layered platform.
- Improved stability, particularly for compact tables. The low-profile, high-density tabletop lowers the floating center of mass, delivering intrinsic stability—even for top-heavy payloads.
