Wet Process & Baking System
Wet Bench Equipment-WS Series
The WS (Wet Station) series is a state-of-the-art, cost-effective wafer processing system solution capable of processing up to 50 wafers in a batch, with multiple tanks suitable for a wide range of chemistries. It supports traditional wet processes such as pre-film clean, etch, post-etch clean, and photoresist stripping. Newly developed features enable batch processing with a smaller footprint, superior productivity, and exceptional cleaning results.
Single Wafer Wet Process Equipment-Polar Series
The Polar series is a single-wafer surface treatment system that leverages FEoL research findings and accumulated expertise in related fields. This system offers exceptional performance and scalability for advanced clean and etch processes, with high throughput and a compact footprint. With industry-recognized reliability and productivity, the company continues to evolve its technology to meet customer requirements and create new advanced cleaning solutions, making it a leading domestic single-wafer wet equipment provider.
Advanced Baking Equipment-Vertabake Series
Vertabake is the most advanced and cost-effective wafer batch baking solution. It can process one batch of wafers (25 wafers) per bake, with the option to bake the batch vertically or horizontally. It is applied in pre-molding baking and pre-underfill baking processes in advanced packaging.
