Verity

半導體及面板乾式蝕刻設備所使用之製程控制及蝕刻終點偵測設備(End Point Detector)。應用於Applied Materials, Lam Research, TEL, YAC, ICD, Wonik IPS, INVENIA 等乾式蝕刻設備上。

Content changed at :2020-02-12 18:12:01