Particle and defect inspection equipment for non-pattern substrate and epi wafer, the main application field are III-V and LED industry.
Stylus or optical profiler is measuring Step Height, Faltness, Roughness, Depth and Stress of substrates for process development or monitor
1. Stylus Profiler
2. Optical Profiler includes ZETA & Filmetrics
Measuring thin films, coatings and materials, perform a wide range of nanoscale mechanical tests including indentation, hardness, scratch and universal nanoscale testing
2. Tensile Tester