繁體中文
EnglishTMC
TMC designs and manufactures advanced building floor vibration isolation systems for nanotechnology. TMC isolators support ultra precision measurements, instruments, and manufacturing.
Continuing to lead the industry with sophisticated active, inertial vibration cancellation systems featuring piezoelectric actuators and digital controllers. Our passive products range from simple, desktop isolated microscope bases, to virtually any size optical table systems.
TMC products enable ultra-precision research, measurements, and manufacturing in the fields of photonics, semiconductor manufacturing, life sciences, drug discovery, and nanotechnology.
STACIS III
STACIS® III is a flexible advanced active vibration isolation system. Employing advanced inertial vibration sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by continuously measuring floor activity, then expanding and contracting piezoelectric actuators to filter out floor motion.
Initially designed to isolate precision microlithography, metrology, and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard solution for the most sensitive instruments in noisy environments, including but not limited to semiconductor fabs, failure analysis labs, nanotechnology research, nanofabrication facilities, and materials research.
Main features
Hundreds of times stiffer than air isolators, STACIS suffers from none of the limitations of air vibration isolation systems. There is no "soft" suspension and, unlike active air systems, STACIS can be placed beneath a tool with an internal active air isolation system with both systems fully optimized.
The unique serial design and proprietary high-force piezoelectric technology
results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, truly active vibration isolation with 90% vibration reduction starting at 2 Hz.
Standard Certification
Application
semiconductor fabs, failure analysis labs, nanotechnology research, nanofabrication facilities, and materials research.
Specification
SEM-Base VI
SEM-Base® VI is the next generation in STACIS active piezoelectric vibration cancellation. SEM-Base VI is designed to support all commercial Scanning Electron Microscopes (SEMs), as well as many Focused Ion Beam (FIB) and Small Dual Beam instruments. SEM-Base VI provides improved vibration isolation performance, a faster more robust controller, and an advanced graphical user interface (GUI). SEM-Base VI will enable more labs and facilities to achieve the level of floor vibration required to satisfy the specifications of the tool manufacturer.
SEM-Base VI uses a unique "serial architecture" in which the vibration sensors measure floor vibration, not payload vibration. This ensures that, unlike other designs, payload resonances do not inherently limit vibration isolation or cause instability. The vibration sensors are low frequency inertial velocity sensors for maximum sensitivity in the difficult to measure sub-Hz range. Combined with our unique piezo-actuator technology, SEM-Base VI achieves extremely high levels of vibration cancellation, even on already quiet floors.
Main features
Hard-Mount Technology – SEM-Base VI is compatible with all internal SEM vibration control systems and aggressively mitigates low frequency floor vibration starting at 0.6 Hz.
Active Inertial Vibration Cancellation – SEM-Base VI uses high sensitivity, low frequency inertial velocity sensors to achieve high levels of vibration attenuation, even on quiet floors.
Serial Design with Piezoelectric Technology – The unique serial design and proprietary highforce piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.
Standard Certification
Application
semiconductor fabs, failure analysis labs, nanotechnology research, nanofabrication facilities, and materials research.
Specification
CleanBench
CleanBench™ is the next generation of our industry standard 63 series lab tables. TMC's vibration isolation lab tables lead the industry in performance and are ideal for a wide variety of applications including AFM, Confocal Microscopy, IVF, Patch-Clamping, Interferometry, and Metrology. CleanBench incorporates TMC's unique Gimbal Piston Vibration Isolators and a tabletop with enhanced performance and features.
Main features
Unique new table-top design (patent pending) combines the best features of TMC's CleanTop steel honeycomb tops with our ultra-stiff, damped, layered platform design.
Greater stability, especially for small size tables. The low profile, high density tops lower the overall floating center-of-mass ensuring inherently stability, even for relatively top-heavy payloads.
Standard Certification
Application
semiconductor fabs, failure analysis labs, nanotechnology research, nanofabrication facilities, and materials research.
Specification