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  LCD - Advanced Energy - Sekidenko Thermal Instrumentation



By engineering advanced temperature measurement systems, our Sekidenko optical fiber thermometers position our thermal management solutions among the world's best by adding value for our customers. Whether you're an OEM who requires custom solutions or an end user who needs application expertise.
Advanced Energy Sekidenko line of optical fiber thermometers offer field-proven temperature measurement technologies for advanced temperature control in plasma thin-film manufacturing. With our in-situ probes, you gain real-time measurement of wafer or chamber-component temperatures, enabling process control optimization. Our pioneering optical fiber thermometry has led to the development of superior temperature control instruments that are accurate, repeatable, and easy to use. With many years of experience in a variety of applications, shipping thousands of OFT systems in RTP, CVD, PVD, and strip systems, we've become the recognized leaders in advanced non-contact temperature measurement.
Sekidenko OR400T
Single-Channel Optical Fiber Thermometer (OFT)
Main Features:
icon Advanced Energy®’s OR400T optical fiber thermometer (OFT) extends the flexibility of the OFT product family with a cost-competitive, non-contact solution for several high-volume semiconductor applications, including PECVD, LPCVD, PVD, and metal etch. The OR400T model offers a single-channel temperature measurement capability and supports RS-232 and analog data interfaces at up to 20 readings per second. Because of its compact design, the OR400T OFT can be easily integrated to meet the unique requirements of many process applications.
Standard Certification:
icon
Application:
icon Epi
PECVD
LPCVD
PVD
MOCVD
Specification:
icon Description: Cost-effective, precision temperature measurement
Channel Configuration: Single-channel temperature measurement capability with selectable/fixed emissivity
Temperature Range(s): 50 to 3500°C
Filter Range: 600 to 1600 nm
Read Rate: Up to 20 Hz temperature read rate
Accuracy: ±1.5°C
Resolution: 0.001°C
Control/Repeatability: ±0.1°C typical
Display: None; set up via RS-232
Data I/O: RS-232 @ up to 115 KB
Analog Output: 0 to 10 V or 4 to 20 mA outputs
Power Requirements: AC: 90 to 263 VAC; 47 to 63 Hz
DC: +24 VDC
Environmental Operational: 10 to 40°C (50 to 104°F)
Physical Dimensions: 55.7 mm (H) x 31.8 mm (W) x 195.2 mm (D); 2.2" (H) x 1.3" (W) x 7.7" (D)
Weight: 0.73 lb (0.33 kg)
Power Supply Line Current: <0.7 A @ 100 VAC
Sekidenko OR400M
Precision Optical IR Pyrometers
Main Features:
icon Advanced Energy®'s OR400M optical pyrometer extends the flexibility of the Sekidenko product family into the mid-IR wavelengths at 3.3 and 5.2 μm. The OR400M unit offers single-channel temperature measurement, supports RS-232 and analog data interfaces, and, because of its compact design, can be easily integrated to meet the unique requirements of many process applications.
Standard Certification:
icon
Application:
icon Photovoltaic (PV) solar applications
PV cell layers measurement
TCO (transparent conductive oxide) layers
CIGS (copper indium gallium selenide) deposition layers
CdTe (cadmium telluride) deposition layers
Specification:
icon Channel Configuration: Single-channel temperature measurement capability with selectable/fixed emissivity
Temperature Range(s): 50 to 1300°C
Measurement Wavelengths: 3.3 and 5.2 μm
Read Rate: Up to 250 Hz
Accuracy: ±3°C
Resolution: Up to 0.01°C
Repeatability: ±0.1°C typical
Display: None; set up via RS-232
Data I/O: RS-232 at up to 115 kB
Analog Output: 0 to 10 V or 4 to 20 mA
Power Requirements: AC: 90 to 263 VAC, 47 to 63 Hz
DC: +24 VDC
Environmental Operational: 15 to 40°C (59 to 104°F)
Physical Dimensions 32 mm (H) x 57 mm (W) x 235 mm (D); 1.26" (H) x 2.30" (W) x 9.26" (D)
Weight: 0.39 kg (0.87 lb)
Power Supply Line Current: < 0.7 A at 100 VAC
Sekidenko OR4000T & OR4000E
Optical Fiber Thermometers and Emissometers
Main Features:
icon Advanced Energy’s OR4000 multi-channel optical fiber thermometers (OFTs) build on the highly successful OR2000 product family and provide industryleading performance in non-contact temperature measurement for many temperature measurement applications. The OR4000T model provides multichannel capability and supports read rates up to 2 kHz for the most demanding temperature measurements. Configured as an OR4000E model, it provides the added benefit of real-time emissivity compensation. The instrument is modular in design and is readily tailored to meet the unique requirements of each process application.
Standard Certification:
icon
Application:
icon OR4000T: RTP, laser annealing, HDP-CVD, MOCVD, ALD, UV Cure, solar cell packaging, and HDD processing.
OR4000E: Epi, CVD, MOCVD, and other processes with changing substrate emissivity.
Specification:
icon OR4000T:
Description: Multi-channel capability, high-speed performance, and read rates up to 2 kHz
Channel Configurations: 1 to 4 channels of temperature measurement capability utilizing selectable/ fixed emissivity; channels individually configurable
OR4000E:
Description: Real-time, dual-channel emissivity compensation measurement and read rates up to 2 kHz
Channel Configurations: 1 to 2 channel, real-time, emissivity-corrected temperature via pulsed emitter(s); channels individually configurable
OR4000T & OR4000E:
Temperature Range(s): 50 to 3500°C
Filter Range: UV to 2300 nm
Read Rate: Up to 2 kHz temperature read rate; Up to 500 Hz read rate for real-time, emissivity-corrected temperature (OR4000E)
Accuracy: ±1.5°C
Resolution: Up to 0.001°C
Control/Repeatability: ±0.1°C typical
Display: Internal, 4 x 20 LCD with keypad entry
Data I/O: RS-232, RS-422/485, and Ethernet
Analog Output: 0 to 10 V or 4 to 20 mA outputs
Control Interface: External trigger input, synchronization output, high and low alarms
Power Requirements: AC: 90 to 263 VAC; 47 to 63 Hz
DC: +24 VDC
Power Supply Line Current: < 0.7 A at 100 VAC
Environmental Operational: 5 to 40°C (41 to 104°F)
Physical Dimensions: 8.6 cm (H) x 15.2 cm (W) x 21.8 cm (D); 3.4" (H) x 6.0" (W) x 8.6" (D)
Weight: 4.5 lb (2 kg)
Response Sample: < 2 ms at 2 kHz sampling rate (temperature only)
Sekidenko MXE
High-Speed Pyrometer
Main Features:
icon The Sekidenko MXE pyrometer combines speed and precision, enabling accurate, non-contact, repeatable measurement and control of demanding applications. Its high-speed (up to 10 kHz) performance is ideal for processes with moving targets, such as rotating susceptors. It is also extremely well suited for dynamic processes, including laser-based processing or rapid anneals. For easy integration and flexible control options, the MXE unit is remarkably compact and supports a variety of I/O protocols.
Standard Certification:
icon
Application:
icon The MXE pyrometer is configurable to suit a variety of applications. Features such as measurement wavelength, active reflectance, optical interface, and I/O protocols can be optimized for a specific application. Measurements up to 10 kHz are possible. In addition, a variety of spot sizes and working distances can be supported. Use of fiber-coupled collection optics can also be supported for applications requiring remote placement of the electronics.
Specification:
icon Configurations: Temperature only; Temperature + reflectance; Reflectance only
Temperature: Range Application dependent
Read Rate: Up to 10 kHz
Accuracy: ±1.5°C, typical
Repeatability: ±0.1°C, typical
Resolution: 0.001°C
Reflectance Accuracy: ±1 %
Reflectance Repeatability: ±0.5 %
Working Distance Range: 100 to 450 mm
Spot Size 2 to 8 mm
Power Requirements: AC: 90 to 263 VAC, 47 to 63 Hz
DC: +24 VDC
Environmental Operational: 18 to 40°C (64 to 104°F), non-condensing
Physical Dimensions 229 mm (D) x 127 mm (W) x 46 mm (H) 9.0” (D) x 5.0” (W) x 1.8” (H)
Weight: < 1.54 kg (3.4 lb)
USB 2.0: Up to 2 kHz transfer rate for 10 kHz data
RS-232: Selectable baud rate up to 460, 800; 7E1 or 8N1
Analog Output: 0 to 10 V or 4 to 20 mA outputs
Control I/O: Sync out, alarms out, source interlock
 
 
 
 
 
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