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  LCD - Advanced Energy - Sekidenko Thermal Instrumentation

By engineering advanced temperature measurement systems, our Sekidenko optical fiber thermometers position our thermal management solutions among the world's best by adding value for our customersXwhether you're an OEM who requires custom solutions or an end user who needs application expertise.
Advanced Energy's Sekidenko line of optical fiber thermometers offer field-proven temperature measurement technologies for advanced temperature control in plasma thin-film manufacturing. With our in-situ probes, you gain real-time measurement of wafer or chamber-component temperatures, enabling process control optimization. Our pioneering optical fiber thermometry has led to the development of superior temperature control instruments that are accurate, repeatable, and easy to use. With many years of experience in a variety of applications, shipping thousands of OFT systems in RTP, CVD, PVD, and strip systems, we've become the recognized leaders in advanced non-contact temperature measurement.
icon Sekidenko OR4000T and OR4000E Optical Fiber Thermometers & Emissometers
  Advanced Energy® OR4000T and OR4000E multi-channel optical fiber thermometers (OFTs) provide industry-leading performance in non-contact temperature measurement for RTP, HDP-CVD, MOCVD, UV cure, and a variety of other semiconductor processes. The OR4000T model provides multi-channel capability and supports read rates up to 2 kHz for the most demanding semiconductor applications. The OR4000E model delivers high-speed performance like the OR4000T, with the added benefit of real-time emissivity compensation. Both models are modular in design and can be rapidly tailored to meet the unique requirements of each process application.
icon Sekidenko OR400M Optical Pyrometers
  Advanced Energys OR400M Optical Pyrometer extends the flexibility of the Sekidenko product family into the mid-IR wavelength range, from 2.3 µm V 5.2 µm. The OR400M offers a single-channel temperature measurement capability for thin-film solar, glass, and advanced semiconductor processes. The OR400M supports RS-232 and analog data interfaces. Because of its compact design, the OR400M can be easily integrated to meet the unique requirements of many process applications.
icon Sekidenko OR400T Optical Fiber Thermometers
  The Advanced Energy® OR400T Optical Fiber Thermometer (OFT) extends the flexibility of the OFT product family with a cost-competitive, non-contact solution for several high-volume semiconductor applications, including PECVD, LPCVD, PVD, and metal etch. Because of its compact design, the OR400T can be easily integrated to meet the unique requirements of many process applications.
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