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  Semiconductor III-V Group - Tera Simicon Corp. - LTPS-LCD/OLED, Oxide TFT, Flexible Annealing system

LTPS-LCD/OLED, Oxide TFT, Flexible Annealing system
In order to produce high quality LCD and AMOLED displays, TERA has integrated an advanced non-laser LTPS (Low Temperature Poly Silicon) process in their equipment.
To crystallize amorphous silicon into polysilicon, a crystallization heat treatment process must take place after uniformly depositing sub-atomic layer levels of a catalyst on the glass with a large-scale of amorphous silicon. TERA was the first in the world to mass produce this process with a non-laser equipment. Our company applies optimum conditions for various heat treatment process equipment including dehydrogenation and hydrogenation processes.
Main Features:
Standard Certification:
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