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  Semiconductor III-V Group - ClassOne - Trident™ SST Spray Solvent Tools

Trident™ SST Spray Solvent Tools
Spray Solvent Tools for 75-200mm Substrates
The Trident Spray Solvent Tool (SST) is the next generation of batch-processing SSTs for Metal Lift-Off, Photoresist Strip, Polymer Removal and other demanding solvent based processes. Trident Spray Solvent Tool models are available for 75 to 200mm substrates — with one or two process chambers; two, four, six or eight heated chemical tanks; and a wide range of rotors. These systems include the proven Windows® 7-based Solaris™ controller as well as remote login, data logging, GEM/SECSII communications and reliability reporting.
Bottom line, Trident SSTs increase uptime and productivity while significantly reducing capital expense — with system pricing that is significantly lower than competitive spray solvent tools.
Main Features:
■ One or two process chambers
■ Available for 75-200mm substrates
■ 2-, 4-, or 6- tank models
■ Wide range of rotors
■ Windows®7-based Solaris controller
■ Remote login
■ Data logging
■ GEM/SECSII communications
Standard Certification:
icon Solstice Plating System
Best of West Winner
Semicon West 2015
Processes for Spray Solvent Tools
■ Metal Lift-Off
■ Resist Strip
■ Polymer Removal
■ Substrate Cleaning
■ Resist Developing
Major Benefits
■ Significantly lower operating expense
■ Reduced chemical consumption
■ Shorter process time
■ Fewer defects
■ Easier control and operation
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