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 Semiconductor III-V Group - Plasma-Therm

Plasma-Therm is a U.S. based manufacturer of etch and thin film deposition equipment for a number of global compound semiconductor and related specialty markets. For more than 35 years, we have enabled various process technologies by coupling reliable platforms with award-winning service. We hold over 37 patents for innovation in plasma process technologies.
We cater to system requirements from research and development through high volume production. Plasma-Therm is committed to the development of systems and services that meet the quality requirements of our customers. This commitment is backed by our VLSIresearch awards in customer satisfaction for 15 consecutive years and our 22 support and spares locations throughout America, Europe and Asia Pacific.
In 2011 Plasma-Therm acquired Advanced Vacuum Europe located in Lomma, Sweden. Established in 1993, Advanced Vacuum quickly grew and began principal sales for vacuum associated components. Advanced Vacuum also established itself as the exclusive distributor in the Nordics of additional first tier vacuum component and systems companies (e.g. Edwards Vacuum and Entergris).
Our reputation as an industry leader is supported by our 35 year focus on customer support, innovation, reliability and low cost of ownership. Our demonstrated production proficiency in high volume manufacturing environments coupled with a strong presence at many major research institutions secures Plasma-Therm’s leadership position as a preferred supplier of plasma process equipment.
icon RIE / ICP Etcher (Manual Vision Series / ICP / DSE / RIE-Load Lock)
icon PECVD (Manual Vision Series / PECVD / HDPCVD)
icon ME (Mask Etcher)
icon Plasma Micro-Die-Singulation (MDS)
Contact:Zoe Liu
Phone :+886-3-516-5177 Ext:8250
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