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  Semiconductor III-V Group - KLA - Zeta-20 / Zeta-300 / Zeta-388 Optical Profiler

Contact:Wayne Tseng
Phone :+886-3-516-5177 Ext: 8270
Contact:Ray Hsieh
Phone :+886-3-516-5177 Ext: 8284
Zeta-20 / Zeta-300 / Zeta-388 Optical Profiler

The Zeta is a fully integrated optical profiling microscope that provides 3D metrology and imaging capability in a compact, robust package. The system is powered by ZDot™ technology, which simultaneously collects high-resolution 3D data and a True Color infinite focus image. The Zeta supports both R&D and production environments with Multi-Mode optics, easy-to-use software, and a low cost of ownership.
Main Features:
icon Easy to use optical profiler with ZDot and Multi-Mode optics to address a wide range of applications, High-quality microscope for sample review or defect inspection
ZDot: Simultaneously collects a high-resolution 3D scan and a True Color infinite focus image
ZXI: White light interferometry for wide area measurements with high z resolution
ZIC: Interference contrast for quantitative 3D data of surfaces with sub-nanometer roughness
ZSI: Shearing interferometry for images with high z resolution
ZFT: Film thickness and reflectance is measured with an integrated broadband reflectometer
AOI: Automatic optical inspection to quantify defects on the sample
Production capability: Fully automated measurements with sequencing and pattern recognition
Standard Certification:
icon Step height: 3D step height from nanometers to millimeters
Texture: 3D roughness and waviness on smooth to very rough surfaces
Form: 3D bow and shape
Stress: 2D thin film stress
Film thickness: transparent film thickness from 30nm to 100µm
Defect inspection: capture defects greater than 1µm
Defect review: KLARF files are used to navigate to defects to measure 3D surface topography or scribe defect locations
icon 1. True Color CCD Camera
2. Zeta Optics Module with Z-Dot Technology
 ・Enable AutoFocus
 ・High efficiency illiumination for transparent substrates and films
 ・Optional X5 interferometer for high Z resolution wide area profiling
 ・Optional Nomarski imaging for very low roughness profiling
 ・Dual LED source to maximize signal from low reflectivity surfaces
 ・ Trough transmissive illumination and dark field imaging options
3. Z-drive
 ・Precision mechanism for 13nm vertical resolution
 ・Optional 2nm resolution piezo Z drive
4. Zeta Control Box
 ・Enables fast high resolution data acquisition
 ・Optional Spectrometer for Film Thickness measurements
5. XY Stage
 ・Open architechture for convenient sample positioning
 ・Optional motorized XY stages
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