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| Step Height Measurement, Etch depth, Roughness, Waviness |
| Main Features: |
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The MicroXAM-100 / MicroXAM-800 is an optical surface profiler from KLA's surface metrology product line.
This non-contact, white light interferometry system differentiates itself with an innovative yet simple user interface.
It features a powerful suite of functions to support the broadest range of applications.
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| Standard Certification: |
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SEMI S2, S8, and S14
European CE
WEEE and RoHS �V 2002/95/EC
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| Application: |
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Semiconductor, LED, LCD, Photovoltaic, Material, LCD, Thin Film |
| Specification: |
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MicroXam-800
1. 250 µm closed loop Z-range piezo
2. 1.4 megapixel camera, 1360 x 1040
3. SMART mode, ZSI, PSI (phase mode), and VSI (vertical scan mode)
4. 152 x 152 mm motorized XY-sample positioning stage
5. 125 mm motorized Z-stage with an optional 76 mm offset block
6. (optional) 360�X theta stage
7. Green and white solid state light sources
8. 1.4 megapixel camera
9. Powered by new software platform �V simple, yet powerful software
10. Windows 7, 64-bit with MS Office
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Semiconductor III-V Group -
KLA - MicroXam-100 / MicroXam-800 Optical Profiler
Company Profile