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  Semiconductor III-V Group - KLA - MicroXam-800 Optical Profiler

Contact:Wayne Tseng
Phone :+886-3-516-5177 Ext: 8270
Contact:Ray Hsieh
Phone :+886-3-516-5177 Ext: 8284
MicroXam-800 Optical Profiler
Step Height Measurement, Etch depth, Roughness, Waviness
Main Features:
icon The MicroXAM-800 is an optical surface profiler from KLA's surface metrology product line. This non-contact, white light interferometry system differentiates itself with an innovative yet simple user interface. It features a powerful suite of functions to support the broadest range of applications.
Standard Certification:
icon SEMI S2, S8, and S14
European CE
WEEE and RoHS �V 2002/95/EC
icon Semiconductor, LED, LCD, Photovoltaic, Material, LCD, Thin Film
icon MicroXam-800
1. 250 µm closed loop Z-range piezo
2. 1.4 megapixel camera, 1360 x 1040
3. SMART mode, ZSI, PSI (phase mode), and VSI (vertical scan mode)
4. 152 x 152 mm motorized XY-sample positioning stage
5. 125 mm motorized Z-stage with an optional 76 mm offset block
6. (optional) 360�X theta stage
7. Green and white solid state light sources
8. 1.4 megapixel camera
9. Powered by new software platform �V simple, yet powerful software
10. Windows 7, 64-bit with MS Office
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