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  Semiconductor III-V Group - Genmark - CODEX Stocker system



CODEX Stocker system

automation-launches-codex-stocker automation-launches-codex-stocker
Benefits :
icon Less clean room footprint
Automation for cleaning route is possible
Live time data tracking available
Eliminates Inspection tools
Integrated metrology can be incorporated in the system
Eliminates sorter tools
Software can enable all normal sorter functions
Feature :
icon High capacity
Highly modular
Configurable
Expandable
Optimized performance (motion blending)
System architecture allows for applying DFX (DFR, DFS, DFM …) approaches
Reduced part count – high reliability
Enhanced troubleshooting and diagnostic capabilities
Easy setup and operation
Effective carrier teaching
Key Technology :
icon Boats are interchangeable within the carousels
Any combination or type of substrate can be stocked in the system
System can be utilized for storage and retrieval of
(1)Silicon wafers ( include reclaim wafer )
(2)GaAs / SiC / GaN Wafer
(3)Glass Wafers
 
 
 
 
 
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