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  Semiconductor III-V Group - AUROS Technology - MERCURY - Pellicle/Mask Particle Inspection System

MERCURY - Pellicle/Mask Particle Inspection System

Main Features:
icon Self-health check & Auto recovery function
Warning/interlock/alarm history management
Alarm for replacing consumable parts
Full inspection area (mask pattern and backside, pellicle membrane and frame)
Selectable inspection mode (full / partial / separated / DNIR )
Support client software (off-line review)
OCR/BCR to identify pellicle & mask (option)
Easy recipe creation and management
Low CoO (Cost of Ownership )
Standard Certification:
icon IDM captive shop : OQC (Outgoing QC)
IDM photo : IQC (Incoming QC)
Mask shop
Pellicle manufacturer
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