Chemistry and Biotechnolog - Canon - Clean Room Air Monitor
Clean Room Air Monitor
As semiconductor processes become finer, and highly-sensitive chemically-amplified resist tends to be adopted in the exposure process more often, a problem arises with damage on the chemically amplified resist caused by ammonia gas.
It is assumed that even if the concentration of ammonia gas is low enough to be expressed by unit of ppb, the resist reaction is interrupted and the exposure pattern is affected. To prevent contamination by the gas, a clean room is generally provided with a chemical filter that adsorbs and removes unnecessary components.
However, coexistence with sources of contamination such as chemicals and humans is inevitable within a clean room. How to prevent contamination caused by those sources has always been a major challenge faced by the semiconductor industry.
As measures against contamination, a clean room is generally provided with an air monitor.By checking the readings of the air monitor, we can detect the possible cause of trouble at an early stage, thus preventing its occurrence.
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Chemistry and Biotechnolog - Canon - Clean Room Air Monitor
As semiconductor processes become finer, and highly-sensitive chemically-amplified resist tends to be adopted in the exposure process more often, a problem arises with damage on the chemically amplified resist caused by ammonia gas.