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 Packaging & Testing - Kingsemi - Automatic Spray Coater |
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Wafer: 8 /12 inch |
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Spray Coater Unit: 2 |
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HP/CP: 6~8 |
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Throughput: 20~30W/H |
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PR : 1um~20um |
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Uniformity: 5um~10Um +/-5~20% |
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- Spray coater speed: 1~100 RPM
- Spin coater speed :1~5000 RPM
- (Max:6000)
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PR : Max.20,000 cp (Spin) 100 cp ( Spray) |
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Size : H1900×W2800×D2050 |
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Robot: 1 / Foup : 2 |
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Option: Nozzle + Spray system / automated clean |
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