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 Packaging & Testing - Kingsemi - Automatic Coater |
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Cluster Tools Track |
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Coater / Developer / Bake |
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Wafer : 8〞 ∼12〞 |
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CD: 0.25μm |
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Uniformity: ≤1.5% |
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Cool / Hot /AD plate : 12 |
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Cool plate: 18~35℃ |
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Hot Plate :50~180 degree℃ (option: Max320 ℃) |
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PR : 5~10,000Cp |
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Spin speed : 5000rpm~ 8000 rpm |
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Acceleration Speed : Max 50,000rpm/s |
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Size :H2060XW2260XD1510mm |
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OS: Windows NT |
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