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  Packaging & Testing - Kingsemi - Automatic Coater



Automatic Coater
icon Cluster Tools Track
icon Coater / Developer / Bake
icon Wafer : 8 12
icon CD: 0.25gm
icon Uniformity: ≤1.5%
icon Cool / Hot /AD plate : 12
icon Cool plate: 18~35J
icon Hot Plate :50~180 degreeJ (option: Max320 J)
icon PR : 5~10,000Cp
icon Spin speed : 5000rpm~ 8000 rpm
icon Acceleration Speed : Max 50,000rpm/s
icon Size :H2060XW2260XD1510mm
icon OS: Windows NT
 
 
 
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