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  LCD - KITEC - M-RES2000M Non-Contact Resistance Measurement



M-RES2000M Non-Contact Resistance Measurement

Main Features:
icon 1.Easy to operate.
2.High accurate result.
3.In line metrology.
Standard Certification:
icon 1.Calibrations by using NIST reference wafer
Application:
icon 1.Solorr- EPI metrology
Specification:
icon 1.Measurement range: 0.0015~6,500 Ωcm(special set up to 25,000 Ωcm)
2.Wafer thickness:650um
3.Repeatability: Typical <0.5%
4.Linearity<0.5%
5.Thickness:100um~1,900um
6.Tool to tool:<1%
7.Conductivity type(option):10mΩcm~1000Ωcm
 
 
 
 
 
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