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 LCD - Kingsemi - Automatic Star Track: Coater/Developer |
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Automatic Star Track: Coater/Developer
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Sapphire: 2”- 8” |
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Spin unit: 2 or 3 |
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CD: 0.25μm |
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Throughput:≥90/h |
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Uniformity:1.5~2.5 um ≤1.5% |
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PR: 5~10,000Cp |
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Hot plate: 6 |
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Cool plate: 2 |
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Cool plate: 18~28℃ |
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Hot Plate : 50~250 degree℃ (option: Max 320 ℃) |
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Spin speed: 1~6000(option:Max 8000 rpm) |
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Acceleration Speed : Max 50,000rpm/s |
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Size : 1360*1300*2100 750 kgs |
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Option: FFU/HMDS,THC |
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