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  LCD - Kingsemi - KS-S300-SP:300mm Spray Coater



KS-S300-SP:300mm Spray Coater

This tool is capable to coat PR, PI, Solder Mask etc. uniformly on a high topography surface. It is designed to meet TSV, MEMS, and WLP process requirements.
System FeatureG
icon Vortexing atomization airmovement, uniformly cover the step edge.
icon Automatically cleaning nozzle.
SpecificationG
icon Wafer Size: 300mm, 200mm
icon Film Thickness: >1µm
icon Film Uniformity: 5% ~ 10%
icon Tool Dimensions: W2680D2000H2000 (mm)
 
 
 
 
 
 
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