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 LCD - Kingsemi - Automatic Linear Track: Coater & Developer |
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Automatic Linear Track: Coater & Developer
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Sapphire: 2”- 6” |
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Spin unit: 2 |
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CD : 0.8μm |
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Output: ≥80/h |
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Uniformity: 2.5~3.5 um ≤3% |
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PR: 5~10,000 cp |
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Hot plate: 4 |
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Cool plate:18~35℃ |
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Hot Plate: 50~180 degree℃ (option: Max 320 ℃) |
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Spin speed : 1~5000 (option: Max 8,000 rpm) |
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Acceleration Speed : Max 50,000rpm/s |
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Size : L=1345 X W=1222 X H=1919 (mm). 500kgs |
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Option: FFU，AD，CP |
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