Thermal-Wet Local Scrubber (Electrical Heating)

1.SAFE: No Fuel Burning: Safest system operation
2.1000oC: High % DRE for SiH4, NF3, etc.
3.Catalyst: High % DRE’s for PFC gases at ~700oC
4.Patented Vortex: Longest PM Cycle
5.Corrosion Resistant Metals: Low Maintenance cost
6.Longest MTBC, Lowest CoO