Micro Image

Wet Local Scrubber

1.Batch-Mode Water Usage: Set-Point: Time or pH
2.>2 Meter Long Gas Path: Calculated % DRE’s

Optional Wetted Inlets: to prevent clogging:
-Tungsten CVD
-Al Etch

Optional Chemical Inject: Max %DRE; Min. H2O Use

<10% Water Usage Water: >90% lower cost)