 Semiconductor III-V Group - Seminet Automation-Reticle Stocker |
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| Reticle Stocker |
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Features:
1. ISO Class 3 airflow provides ultra clean storage environment.
2. Scalable Storage (up to 3000 Reticles)
3. Supports Multiple Load Port Cannon, Nikon, SMIF 150/200
4. Glass and Pellicle Inspection (10ยต and better)
5. Electrostatic Charge monitor SEMI E109 Compliant
6. Supports: Manual, AGV, PGV, OHT loading |
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