| Rhazer® - Performance Specifications |
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Haze Removal: 100% (Without Pellicle Removal) |
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System Throughput: < 8 hours (Frontside & Backside) |
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Mask Materials: Chrome, MoSi, Quartz. |
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Phase Angle Loss: None |
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Transmission Effect: Minimal |
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Mask Size: 150mm x 150mm x 25mm |
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Comprehensive pattern copy of large and complex geometries |