| The SPARK Systems offers ultra fast semi micro inspection of patterned and unpatterned 300mm wafers. Due to the innovative One-Shot-Technology the system achieves high throughput at high sensitivity, stability and matching performance: |
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Up to 1£gm sensitivity @ >150 wph on any pattern |
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No moving parts during measurement |
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10x Reduced Cost of Ownership |
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Illuminate & image full wafer at once |
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Best matching & stability |
Company Profile
Semiconductor III-V Group - Nanda Tech.
