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| Measure CD, Overlay, defect, Failure analysis in MEMS,Power Semiconductor, Package |
| Main Features: |
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1. Easy to operate.
2. High accurate result.
3. Multi function tool.
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| Standard Certification: |
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1. Company obtained certificates of ISO
2. Products obtained certificates of SEMI S2
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| Application: |
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Measure CD, Overlay, defect, Failure analysis of wafer,
Measure CD, defect inspection.
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| Specification: |
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CD Measurement
down to ~0.3µm
optimized algorithms
flexible calibration SW
Overlay Metrology
Overlay repeatabiliy (3σ)
Resist Layer < 2nm
Etched Layer < 4nm
TIS calibrated < 3nm
Film Thickness measurement
1- 3 layers
10nm ... 40µm
Fit & FFT algorithms
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Company Profile
Semiconductor III-V Group - Muetec - MT3000