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  Semiconductor III-V Group - Muetec - IRIS2100(200mm)



IRIS2100(200mm)
Measure CD, Overlay, defect, Failure analysis in MEMS,Power Semiconductor, Package
Main Features:
icon 1. Easy to operate.
2. High accurate result.
3. Multi function tool.
Standard Certification:
icon 1. Company obtained certificates of ISO
2. Products obtained certificates of SEMI S2
Application:
icon Measure CD, Overlay, defect, Failure analysis in MEMS,Power Semiconductor, Package
Specification:
icon CD Measurement
down to ~0.3µm
optimized algorithms
flexible calibration SW
Overlay Metrology
Overlay repeatabiliy (3σ)
Resist Layer < 2nm
Etched Layer < 4nm
TIS calibrated < 3nm
Film Thickness measurement
1- 3 layers
10nm ... 40µm
Fit & FFT algorithms
 
 
 
 
 
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