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| Track with System of temperature and humidity controller |
| Main Features: |
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1. Controlled by PC base which diffent from the original tool controlled by poard base.
2. There are more 50 data base which can upload to host for customer reading.
3. Having engineer saving certificate-IE3.
4. Longer parts lifetime.
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| Standard Certification: |
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Products obtained certificates of SEMI S2 |
| Application: |
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On photolithography's key process. |
| Specification: |
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Temperature Control Range −
THC : 20 ~ 25℃(±0.05℃)
TCU : 20 ~ 25℃(±0.05℃)
Humidity Control Range − THC : 40 ~ 50%(±0.25%)
Wind Speed − 110.0 m³/m
Flow Rate − 156.0 ℓ/m
Power Specification − 3PH/208V(±10%)
External Dimensions − 1,300(W)*2,536(D)*1,810(H)
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Semiconductor III-V Group - MELcon - STHC (system of temperature and humidity) SALCS-M6Z
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