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  Semiconductor III-V Group - KOSTEK Systems, Inc. - KOSTEK R-8000 Descum Series



KOSTEK R-8000 Descum Series
Main Features:
icon 1. High throughput with specially designed wafer transfer system.
2. Two wafers handling with one pick and place action by ATM robot.
3. Special model for long time process (≥ 60sec).
4. Up to 6 separated process modules : R-9400 & R-9600
5. Various process combination for customer’s convenience.
6. Easy conversion between 8” and 12”.
7. Good repeatability and reliability
Standard Certification:
icon 1. Within wafer uniformity : ≤ ±5.0 [%]
2. Wafer to wafer uniformity : ≤ ±3.0 [%]
3. Throughput : ≥ 360 [WPH]
Application:
icon Descum of photo resist, polyimide, BCB, and PBO in the bumping process.
Specification:
 
 
 
 
 
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