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 Semiconductor III-V Group - |
KLA-Tencor SensArray |
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| KLA-Tencor SensArray |
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Wireless Temperature Sensor Wafer( Plasma Temp & integral wafer) to monitor etching chamber ,implant chamber and wet etching temperature distribution by using software to analysis the data.
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Wireless Temperature sensor wafer to monitor hot plate temperature distribution during post exposure bake by using the surface to analysis the data
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PlasmaVolt takes advantage of the Sensorwafer architecture to depoly the sensors to the wafer serface, interfacing directly with the sheath. The sensor wafer is completely autonomous, entering the chamber just like a real production wafer. All the major process variables that affect the plasma conditions have a signature on Plasma Volt. Pressure, gas flow, gas type, magnetic field strength and rotational frequency-all are detectable with this easy to use system.
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