 Semiconductor III-V Group - FRT- MicroProf 200/300 |
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| Optical Surface Analyzers: |
| --Multi Sensor Stage: |
| CWL, CFM, TTV, AFM, Film thickness sensors are available at the same stage. |
| --Applications |
| Roughness, Waivness |
| Profile, Topography |
| Step height, Radius of curvature, |
| Angle |
| Wafer Inspection |
| TTV, bow, warpage, LTV, Sori…. |
| Film Thickness |
| thin film, thick film, multi layer, |
| mapping of thickness. |
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