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1. Batch-Mode Water Usage: Set-Point: Time or pH
2. >2 Meter Long Gas Path: Calculated % DRE’s
Optional Wetted Inlets: to prevent clogging:
	Tungsten CVD
	Al Etch
	Optional Chemical Inject: Max %DRE; Min. H2O Use
	<10% Water Usage Water: >90% lower cost)

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