 Semiconductor III-V Group - Integrated Materials Inc-Poly Silicon Furnaceware |
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| Thermal-Wet Local Scrubber (Electrical Heating) |
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1. SAFE: No Fuel Burning: Safest system operation
2. 1000oC: High % DRE for SiH4, NF3, etc.
3. Catalyst: High % DRE’s for PFC gases at ~700oC
4. Patented Vortex: Longest PM Cycle
5. Corrosion Resistant Metals: Low Maintenance cost
6. Longest MTBC, Lowest CoO |
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