Automated Pellicle Mounting System
1. Automatic multi pellicle size option can handle up to 6 pellicle sizes.
2. Robot removes pellicle from OEM shipping container.
3. Robot removes reticle from 200mm SMIF pod or standard clamshell shipping container.
4. Robot places reticle with pellicle in 200mm SMIF pod or clamshell shipping container.
5. Operator GUI is recipe driven for additional flexibility.
6. Automatic Pellicle heights range 8 mm to 4 mm.

Automated Pellicle De-Mounting System
1. Completely hands free, no operator handling of pellicle or reticle reduces reticle damage.
2. Precision control of pellicle demounting pressure and time for better process consistency.
3. Robot removes reticle from 200mm SMIF pod or standard clamshell shipping container.
4. De-mounter module removes pellicle and discards used pellicle in operator accessible bin.
5. Robot places bare reticle in SMIF pod or clamshell shipping container.
6. Operator GUI is recipe driven.
7. Automatically adjusts for different pellicle sizes.