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 Semiconductor III-V Group - Rhetech - SRD Spin-Rinse-Dryer


Rhetech: SRD Serial
(SRD)High-Performance Cleaning, Rinsing and Drying,Up to 300 mmSRD is a 25 wafer, batch size, single or dual chamber tool. Efficient chamber Designl On axis orientationl Electropolished 316 stainless steel Quick Ramp DC Drive motor, Use<3 gallons of DI water per run
 
 
 
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