- Contact/Proximity Alignment - 60-100 WPH

- Infrared Backside Alignment

- Dual Channel Light Integration or C.I.

- Fiber Optic Illumination

- High Resolution Video

- Wafer Sizes: 2" to 6" Semi Spec, Pieces, Squares

- Wafer Feed: Manual and/or Cassette to Cassette Auto Feeder

- Alignment: Manual / Automatic

- UV Power: 250, 350, 500 Watts, 1 and 2 Kilo Watts

- UV Spectrum: Deep UV, NEAR Deep UV, Near UV

- Resolution: Less Than .5um in Hard Contact