- Substrate size from pieces to 100 mm diameter

- Manual X, Y and theta alignment stage

- Vacuum / Pressure Contact Exposure Modes

- Manual tray loading feature
- Split field/ Single field optical microscope

- Simple, topside mask loading

- User friendly

- Low maintenance

- Available Options:

Infrared (IR) back side alignment

UV / NUV exposure optics

Carousel loading

CCTV Viewing