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  Semiconductor III-V Group - KLA-Tencor - HRP 250 Automated High Resolution Stylus Profiler



HRP 250 Automated High Resolution Stylus Profiler
Step Height Measurement, Etch depth, Roughness, Waviness
Main Features:
icon KLA-Tencor's HRP-250 stylus profilers are the most production worthy surface metrology solutions available in the leading edge 300mm market. The 340 series are based on decades of technology enhancements which allow them to support the most advanced applications at the lowest cost. Established use cases include etch, CMP, and C4 bump monitoring, while new applications continue to develop in emerging markets.
Standard Certification:
icon SEMI S2, S8, and S14
European CE
WEEE and RoHS V 2002/95/EC
Application:
icon Semiconductor, LED, LCD, Photovoltaic, Material, LCD, Thin Film
Specification:
icon HRP-250
1. 200 mm scan length standardV no stitching required
2. 90 x 90 µm high resolution scanning (HRP-250)
3. Diamond stylus: 20 nm radius (or larger)
4. Up to 327 µm Z-range
5. Dynamic force control 0.03 V 50 mg
6. Fully automated operation for 75, 100, 125, 150, and 200 mm wafers
7. Full automation with pattern recognition, Feature Find, and GEM/SECS communication
 
 
 
 
 
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