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  Semiconductor III-V Group - KLA-Tencor - D-500 / D-600 Stylus Profiler



D-500 / D-600 Stylus Profiler
Step Height Measurement, Etch depth, Roughness, Waviness
Main Features:
icon The Alpha-Step® D-500 & D-600 offers high resolution 2D profiling, 2D stress, profile stitching, and many more features in an easy-to-use platform with the best price-to-performance available in the market.
The D-500 system includes an innovative optical lever sensor technology that provides the highest vertical range at 1200 gm, sub-Angstrom resolution plus low force, 0.03 to 15 mg. The ability to measure a wide range of applications, from nanometer to millimeter steps, high resolution roughness, soft materials, and thin fi lm stress enables the D-500 to serve various industries in research and development and production environments.
The D-500 includes a 140 mm manual stage. The system features advanced optics, a high resolution 5 MP camera with a 4x digital zoom and enhanced video controls for highly versatile sample visualization.
Standard Certification:
icon SEMI S2, S8, and S14
European CE
WEEE and RoHS V 2002/95/EC
Application:
icon Semiconductor, LED, LCD, Photovoltaic, Material, LCD, Thin Film
Specification:
icon 1200 µm vertical range standard
5 Å step height repeatability on 1 µm standard
5 MP color camera with 4x digital zoom
Simplified recipe setup (D-600 Only): 3D recipe, sequence recipe with single site deskew, and automated stitching
 
 
 
 
 
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