 Semiconductor III-V Group - |
Kairos |
- Plama Descum Asher qߦk |
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| Kairos T-7210 |
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 Hardware compatible for 75-200mm wafers
Single cassette processing
Downstream plasma process, no wafer radiation/charge damage
High Purity Quartz ware: Chamber, bubbler, diffuser
lamp plate, Spool, Collar and gas distribution plate
Heated platen up
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