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 Semiconductor III-V Group - Genmark Automation - Auto 6”, 8”, 12” Wafer Sorter |
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Genmark Automation
Auto 6”, 8”, 12” Wafer Sorter
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1. 2 to 8 Cassette Stations or Load Ports are available.
2. Automatic pressure control system adjusts fan speed to maintain pressure set-points through changes in surrounding pressures.
3. Integrated controls and monitoring system
4. Fan-filter unit with VFD controlled impeller and PTFE media filter.
5. Installation, certification, and balance to SEMI E-44-96.
6. SEMI S2-93A, S6-93 compliant.
7. CFD model available upon request.
8. Integral lighting.
9. Linear track eliminated.
10. Automatic station miss-alignment compensation |
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