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Semiconductor III-V Group -Accretech - Habanero


Habanero: Wafer Edge Cleaner
icon FACE TM Technology(Flame Assisted Chemical Etch)
icon Integrated Edge Inspection System
icon Precise control of film removal(WEE annular uniformity: +/-100gm)
icon  Cost of Consumables: $0.03/wafer
icon Throughput >100 WPH (300mm)
icon Co

 
 
 
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