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  LCD - Kingsemi - KS-S300-SP:300mm Spray Coater 噴霧式光阻塗佈機



KS-S300-SP:300mm Spray Coater
噴霧式光阻塗佈機

This tool is capable to coat PR, PI, Solder Mask etc. uniformly on a high topography surface. It is designed to meet TSV, MEMS, and WLP process requirements.
System Feature:
icon Vortexing atomization airmovement, uniformly cover the step edge.
icon Automatically cleaning nozzle.
Specification:
icon Wafer Size: 300mm, 200mm
icon Film Thickness: >1µm
icon Film Uniformity: 5% ~ 10%
icon Tool Dimensions: W2680×D2000×H2000 (mm)
 
 
 
 
 
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