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  自有產品 - Orion Spray Technology Tool
 



Scientech offers Orion Spray Technology PR Stripper to provide a more cost-effective solution in a dry-in/dry-out semi-automated batch tool.
Benefits:
1: One chamber can handle 50 wafers at once
2: Flexible for tool configuration with single or dual chambers
3: Capable of handling from 2” to 6” wafers
4: Low CoO
Applications:
icon Post CMP Clean
icon GaAs Etch/Clean
icon PR Strip
icon Post Ash Clean PR Strip
icon Post Etch Clean
icon Organic Clean
 
 
 
 
 
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