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儀器詳細介紹
 
icon FP650: Repairing mask by laser technology
以雷射修補光罩
icon Merlin: Repairing mask and removing particle contamination by nanobit technology
以鑽石鍍膜針頭修補光罩及去除光罩上污染微粒
icon Rhazer: Removing haze on mask by laser technology without pellicle removal
不必移除pellicle, 直接以雷射去除光罩上的 haze
   

 
 
 
 
 
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