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  半導體III-V 族 - Muetec - MT3000



MT3000
特點:
icon 1. 操作簡單
2. 量測結果精準
3. 一機多用
標準規範:
icon 1. 公司通過三體系認證 &ISO
2. 產品符合SEMI S2 規範
應用:
icon 應用於wafer 量測CD, Overlay, defect, Failure analysis, 光罩量測CD, defect.
規格:
icon CD Measurement(臨界尺度)
down to ~0.3µm
optimized algorithms
flexible calibration SW
Overlay Metrology(疊圖)
Overlay repeatabiliy (3σ)
Resist Layer < 2nm
Etched Layer < 4nm
TIS calibrated < 3nm
Film Thickness measurement(膜厚)
1- 3 layers
10nm ... 40µm
Fit & FFT algorithms
 
 
 
 
 
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