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  半導體III-V 族 - KOSTEK systems 株式會社 - KOSTEK R-9000 Descum 系列



KOSTEK R-9000 Descum 系列
具6組獨立製程腔體的高均勻性電漿系統
特點:
icon R-9000系列具有每小時產量超過350片(製程時間30秒)的優異產能
標準規範:
icon 1. WiW均勻性≦5%。
2. WtW均勻性≦2%。
應用:
icon 適用PR、PI、PBO與BCB除渣製程。
規格:
icon 1. Up to 6 separated process modules
2. Rydeen 9000 series achieve high throughput
    - R-9400 : Max. 240 [wph] (@ Process Time 30sec)
    - R-9600 : Over.360 [wph] (@ Process Time 30sec)
3. Balanced ICP plasma source makes good uniformity and stable process.
4. Easy convertible from/to 200mm and 300mm wafer
5. Descum processes : Photo Resist, PI, BCB and PBO
6. Transferring two wafers by one movement of ATM robot
7. Specially designed transfer module & load lock
 
 
 
 
 
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