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  半導體III-V 族 - KITEC - M-RES2000AL 非接觸式電阻量測機



M-RES2000AL 非接觸式電阻量測機
應用於Si, SiC, Compound EPI 量測厚度及阻質
特點:
icon 1.操作簡單
2.量測結果精準
3.整面 Wafer 都可量測
標準規範:
應用:
icon 1.Semiconductor - EPI metrology
2.Compound - EPI metrology
規格:
icon 1.Measurement range: 0.0015~6,500 Ωcm(special set up to 25,000 Ωcm)
2.Wafer thickness:650um
3.Repeatability: Typical <0.5%
4.Linearity<0.5%
5.Thickness:100um~1,900um
6.Tool to tool:<1%
7.Conductivity type(option):10mΩcm~1000Ωcm
 
 
 
 
 
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